Issued Patents 2018
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10151929 | Illumination optical unit for projection lithography and hollow waveguide component therefor | Thomas Stammler | 2018-12-11 |
| 10146135 | Microlithographic projection exposure apparatus having a multi-mirror array with temporal stabilisation | Michael Layh, Michael Patra, Johannes Wangler, Manfred Maul, Damian Fiolka +1 more | 2018-12-04 |
| 10133183 | Optical component | Michael Patra, Paul Buettner, Willi Heintel, Henner Baitinger | 2018-11-20 |
| 10088754 | Illumination system for microlithography | Axel Scholz, Frank Schlesener, Nils Haverkamp, Vladimir Davydenko, Michael Gerhard +8 more | 2018-10-02 |
| 10061203 | Beam distributing optical device and associated unit, system and apparatus | Michael Patra, Thomas Korb | 2018-08-28 |
| 10018917 | Illumination optical unit for EUV projection lithography | Stig Bieling, Martin Endres, Michael Patra, Johannes Wangler | 2018-07-10 |
| 10012907 | Optical system of a microlithographic projection exposure apparatus | Thomas Korb | 2018-07-03 |
| 10007193 | Projection exposure apparatus and method for controlling a projection exposure apparatus | Michael Patra | 2018-06-26 |
| 9983483 | Illumination system of a microlithographic projection exposure apparatus | Michael Patra, Stig Bieling, Frank Schlesener, Markus Schwab | 2018-05-29 |
| 9977334 | Lighting system of a microlithographic projection exposure system and method for operating such a lighting system | Vladimir Davydenko, Thomas Korb, Johannes Eisenmenger | 2018-05-22 |
| 9977333 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Erich Schubert, Alexander Kohl, Gerhard-Wilhelm Ziegler, Michael Patra, Michael Layh | 2018-05-22 |
| 9946161 | Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method | Ingo Saenger, Ralf Scharnweber, Olaf Dittmann, Toralf Gruner, Gundula Weiss +5 more | 2018-04-17 |
| 9933704 | Microlithography illumination optical system and microlithography projection exposure apparatus including same | Michael Patra, Michael Layh | 2018-04-03 |
| 9933706 | Illumination system of a microlithographic projection exposure apparatus | Damian Fiolka, Gerhard-Wilhelm Ziegler | 2018-04-03 |
| 9910359 | Illumination system of a microlithographic projection exposure apparatus | Vladimir Davydenko, Thomas Korb, Frank Schlesener, Stefanie Hilt, Wolfgang Hoegele | 2018-03-06 |
| 9910360 | Lighting system of a microlithographic projection exposure system and method for operating such a lighting system | Vladimir Davydenko, Thomas Korb, Johannes Eisenmenger | 2018-03-06 |
| 9897925 | Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus | Stefan Xalter, Yim-Bun Patrick Kwan, Andras G. Major, Manfred Maul, Johannes Eisenmenger +6 more | 2018-02-20 |