Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10151982 | Illumination system of a microlithographic projection exposure apparatus with a birefringent element | Daniel Walldorf, Ingo Saenger | 2018-12-11 |
| 10146135 | Microlithographic projection exposure apparatus having a multi-mirror array with temporal stabilisation | Michael Layh, Markus Deguenther, Michael Patra, Johannes Wangler, Manfred Maul +1 more | 2018-12-04 |
| 9933706 | Illumination system of a microlithographic projection exposure apparatus | Markus Deguenther, Gerhard-Wilhelm Ziegler | 2018-04-03 |
| 9897925 | Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus | Stefan Xalter, Yim-Bun Patrick Kwan, Andras G. Major, Manfred Maul, Johannes Eisenmenger +6 more | 2018-02-20 |