Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10139733 | Diaphragm changing device | Hermann Bieg, Marcus Will, Thomas C. Bischoff, Yim-Bun Patrick Kwan, Uy-Liem Nguyen +1 more | 2018-11-27 |
| 9897925 | Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus | Yim-Bun Patrick Kwan, Andras G. Major, Manfred Maul, Johannes Eisenmenger, Damian Fiolka +6 more | 2018-02-20 |