Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10146135 | Microlithographic projection exposure apparatus having a multi-mirror array with temporal stabilisation | Michael Layh, Markus Deguenther, Michael Patra, Johannes Wangler, Damian Fiolka +1 more | 2018-12-04 |
| 10088754 | Illumination system for microlithography | Axel Scholz, Frank Schlesener, Nils Haverkamp, Vladimir Davydenko, Michael Gerhard +8 more | 2018-10-02 |
| 10054786 | Correction of optical elements by correction light irradiated in a flat manner | Sascha Bleidistel | 2018-08-21 |
| 9995938 | Spectacle lens for a display device that can be fitted on the head of a user and generates an image | Lisa Riedel, Hans-Juergen Dobschal, Gerhard Kelch, Wolf Krause, Karsten Lindig +4 more | 2018-06-12 |
| 9964856 | Illumination optical unit for projection lithography | — | 2018-05-08 |
| 9955563 | EUV light source for generating a usable output beam for a projection exposure apparatus | Ingo Saenger, Christoph Hennerkes, Johannes Ruoff, Daniel Kraehmer | 2018-04-24 |
| 9897925 | Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus | Stefan Xalter, Yim-Bun Patrick Kwan, Andras G. Major, Johannes Eisenmenger, Damian Fiolka +6 more | 2018-02-20 |