Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10078267 | Method for predicting at least one illumination parameter for evaluating an illumination setting | Ralf Gehrke, Wolfgang Hoegele, Joerg Zimmermann | 2018-09-18 |
| 9955563 | EUV light source for generating a usable output beam for a projection exposure apparatus | Ingo Saenger, Manfred Maul, Johannes Ruoff, Daniel Kraehmer | 2018-04-24 |