Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10068325 | Method for three-dimensionally measuring a 3D aerial image of a lithography mask | Ulrich Matejka, Christoph Husemann, Sascha Perlitz, Hans-Jurgen Mann | 2018-09-04 |
| 10048592 | Projection lens, projection exposure apparatus and projection exposure method for EUV microlithography | Stephan Andre, Daniel Golde, Toralf Gruner, Norbert Wabra, Ricarda Schoemer +1 more | 2018-08-14 |
| 9955563 | EUV light source for generating a usable output beam for a projection exposure apparatus | Ingo Saenger, Manfred Maul, Christoph Hennerkes, Daniel Kraehmer | 2018-04-24 |
| 9933710 | Projection exposure method and projection exposure apparatus | Stephan Andre, Daniel Golde, Toralf Gruner | 2018-04-03 |