Issued Patents 2018
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10061206 | Projection lens with wave front manipulator and related method and apparatus | Boris Bittner, Sonja Schneider, Ricarda Schoemer | 2018-08-28 |
| 10048592 | Projection lens, projection exposure apparatus and projection exposure method for EUV microlithography | Stephan Andre, Daniel Golde, Toralf Gruner, Johannes Ruoff, Ricarda Schoemer +1 more | 2018-08-14 |
| 10018907 | Method of operating a microlithographic projection apparatus | Boris Bittner, Sonja Schneider, Ricarda Schoemer, Martin von Hodenberg | 2018-07-10 |
| 10001631 | Projection lens for EUV microlithography, film element and method for producing a projection lens comprising a film element | Boris Bittner, Sonja Schneider, Ricarda Schoemer, Hendrik Wagner, Christian Wald +6 more | 2018-06-19 |
| 9977338 | Projection objective for a microlithographic projection exposure apparatus | Robert Eder | 2018-05-22 |
| 9964859 | Lithography projection objective, and a method for correcting image defects of the same | Ulrich Loering, Vladan Blahnik, Wilhelm Ulrich, Daniel Kraehmer | 2018-05-08 |
| 9939730 | Optical assembly | Walter Pauls, Hendrik Wagner, Florian Ahles, Christian Wald, Steffen Fritzsche +3 more | 2018-04-10 |
| 9910364 | Projection exposure apparatus including at least one mirror | Boris Bittner, Sonja Schneider, Ricarda Schoemer, Stefan Rist | 2018-03-06 |