Issued Patents 2018
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10151922 | Wavefront correction element for use in an optical system | Matus Banyay, Martin Weiser | 2018-12-11 |
| 10061206 | Projection lens with wave front manipulator and related method and apparatus | Norbert Wabra, Sonja Schneider, Ricarda Schoemer | 2018-08-28 |
| 10054860 | Projection exposure apparatus with optimized adjustment possibility | Holger Walter, Matthias Roesch | 2018-08-21 |
| 10042265 | Lithographic projection objective | Olaf Rogalsky, Thomas Petasch, Jochen Haeussler | 2018-08-07 |
| 10018907 | Method of operating a microlithographic projection apparatus | Norbert Wabra, Sonja Schneider, Ricarda Schoemer, Martin von Hodenberg | 2018-07-10 |
| 10001631 | Projection lens for EUV microlithography, film element and method for producing a projection lens comprising a film element | Norbert Wabra, Sonja Schneider, Ricarda Schoemer, Hendrik Wagner, Christian Wald +6 more | 2018-06-19 |
| 9939730 | Optical assembly | Walter Pauls, Hendrik Wagner, Florian Ahles, Christian Wald, Steffen Fritzsche +3 more | 2018-04-10 |
| 9927714 | Projection exposure apparatus with at least one manipulator | Stefan Rist | 2018-03-27 |
| 9910364 | Projection exposure apparatus including at least one mirror | Norbert Wabra, Sonja Schneider, Ricarda Schoemer, Stefan Rist | 2018-03-06 |