Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9925696 | Irradiation and molding unit | Clemens Trumm, Holger Albrecht | 2018-03-27 |
| 9927714 | Projection exposure apparatus with at least one manipulator | Boris Bittner | 2018-03-27 |
| 9910364 | Projection exposure apparatus including at least one mirror | Boris Bittner, Norbert Wabra, Sonja Schneider, Ricarda Schoemer | 2018-03-06 |