Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10042265 | Lithographic projection objective | Olaf Rogalsky, Boris Bittner, Jochen Haeussler | 2018-08-07 |
| 9891535 | Optical projection system | Johannes Rau, Armin Schoeppach, Bernhard Gellrich, Jens Kugler, Martin Mahlmann +2 more | 2018-02-13 |