Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10133021 | Positioning unit and apparatus for adjustment of an optical element | Ulrich Weber | 2018-11-20 |
| 9977228 | Optical module for a microlithography objective holding optical elements with supporting device located in non-equidistant manner | Franz Sorg, Yim-Bun Patrick Kwan | 2018-05-22 |
| 9904175 | EUV imaging apparatus | Stefan Hembacher, Michaela Schmid | 2018-02-27 |
| 9891535 | Optical projection system | Johannes Rau, Armin Schoeppach, Bernhard Gellrich, Martin Mahlmann, Bernhard Geuppert +2 more | 2018-02-13 |