Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10146048 | Optical assembly, projection system, metrology system and EUV lithography apparatus | Michael James Brehm, Wolfgang Merkel, Henry Wegert | 2018-12-04 |
| 10133021 | Positioning unit and apparatus for adjustment of an optical element | Jens Kugler | 2018-11-20 |