Issued Patents 2018
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10139733 | Diaphragm changing device | Hermann Bieg, Marcus Will, Thomas C. Bischoff, Uy-Liem Nguyen, Stefan Xalter +1 more | 2018-11-27 |
| 10108094 | Projection exposure apparatus with near-field manipulator | Peter Deufel, Johannes Lippert, Pascal Marsollek, Jasper Wesselingh | 2018-10-23 |
| 10095120 | Vibration-compensated optical system, lithography apparatus and method | Tim Groothuijsen | 2018-10-09 |
| 10031423 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Ulrich Loering, Oliver Natt, Gero Wittich, Timo Laufer +7 more | 2018-07-24 |
| 9977228 | Optical module for a microlithography objective holding optical elements with supporting device located in non-equidistant manner | Jens Kugler, Franz Sorg | 2018-05-22 |
| 9976931 | Optical imaging arrangement with multiple metrology support units | Erik Ruinemans | 2018-05-22 |
| 9933707 | Optical apparatus for use in photolithography | Erik Roelof Loopstra | 2018-04-03 |
| 9897925 | Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus | Stefan Xalter, Andras G. Major, Manfred Maul, Johannes Eisenmenger, Damian Fiolka +6 more | 2018-02-20 |
| 9891534 | Optical imaging arrangement with multiple metrology support units | — | 2018-02-13 |