Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10108094 | Projection exposure apparatus with near-field manipulator | Peter Deufel, Johannes Lippert, Pascal Marsollek, Yim-Bun Patrick Kwan | 2018-10-23 |
| 10025200 | Optimum arrangement of actuator and sensor points on an optical element | Pascal Marsollek, Johannes Lippert, Sascha Bleidistel | 2018-07-17 |