Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10162270 | Projection exposure apparatus comprising a measuring system for measuring an optical element | Joachim Hartjes, Toralf Gruner | 2018-12-25 |
| 10162267 | Projection exposure apparatus including mechanism to reduce influence of pressure fluctuations | Toralf Gruner, Alexander Wolf, Joachim Hartjes, Markus Schwab, Markus Hauf | 2018-12-25 |
| 10146137 | Catadioptric projection objective including a reflective optical component and a measuring device | Toralf Gruner, Christoph Zaczek, Ralf Mueller | 2018-12-04 |
| 10054786 | Correction of optical elements by correction light irradiated in a flat manner | Manfred Maul | 2018-08-21 |
| 10025200 | Optimum arrangement of actuator and sensor points on an optical element | Pascal Marsollek, Johannes Lippert, Jasper Wesselingh | 2018-07-17 |
| 10012911 | Projection exposure apparatus with wavefront measuring device and optical wavefront manipulator | Michael Arnz, Toralf Gruner, Joachim Hartjes, Markus Schwab | 2018-07-03 |
| 9964673 | Optical system with aperture device having plurality of aperture elements | Benjamin Sigel | 2018-05-08 |