Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10162267 | Projection exposure apparatus including mechanism to reduce influence of pressure fluctuations | Toralf Gruner, Sascha Bleidistel, Alexander Wolf, Joachim Hartjes, Markus Schwab | 2018-12-25 |
| 10108097 | Arrangement for manipulating the position of an element | Ulrich Schoenhoff, Eylem Bektas | 2018-10-23 |
| 10101507 | Mirror device | Yanko Sarov, Markus Holz, Fabian Haacker, Mark Christof Wengler | 2018-10-16 |
| 10031423 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Ulrich Loering, Oliver Natt, Gero Wittich, Timo Laufer +7 more | 2018-07-24 |
| 9887613 | Lithography device with eddy-current brake | Alexander Vogler | 2018-02-06 |
| 9874819 | Mirror array | Stig Bieling, Lars Wischmeier, Fabian Haacker, Martin Endres, Johannes Eisenmenger | 2018-01-23 |