Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10018803 | Device and method for controlling positioning of multiple adjustable mirror elements in a multi-mirror arrangement | Jan Horn, Markus Holz, Joerg Specht, Stefan Krone | 2018-07-10 |
| 9977334 | Lighting system of a microlithographic projection exposure system and method for operating such a lighting system | Markus Deguenther, Vladimir Davydenko, Thomas Korb | 2018-05-22 |
| 9915872 | Optical component | — | 2018-03-13 |
| 9910360 | Lighting system of a microlithographic projection exposure system and method for operating such a lighting system | Markus Deguenther, Vladimir Davydenko, Thomas Korb | 2018-03-06 |
| 9897925 | Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus | Stefan Xalter, Yim-Bun Patrick Kwan, Andras G. Major, Manfred Maul, Damian Fiolka +6 more | 2018-02-20 |
| 9874819 | Mirror array | Stig Bieling, Markus Hauf, Lars Wischmeier, Fabian Haacker, Martin Endres | 2018-01-23 |