Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10146136 | Reflecting coating with optimized thickness | Martin Endres, Hartmut Enkisch | 2018-12-04 |
| 10133182 | Illumination optical assembly for a projection exposure apparatus | Martin Endres | 2018-11-20 |
| 10018917 | Illumination optical unit for EUV projection lithography | Martin Endres, Markus Deguenther, Michael Patra, Johannes Wangler | 2018-07-10 |
| 9983484 | Illumination optical unit for EUV projection lithography | Martin Endres, Ralf Mueller | 2018-05-29 |
| 9983482 | Radiation collector, radiation source and lithographic apparatus | Erik Roelof Loopstra, Olav Waldemar Vladimir Frijns, Antonius Theodorus Wilhelmus Kempen, Ivo Vanderhallen, Nicolaas Ten Kate +6 more | 2018-05-29 |
| 9983483 | Illumination system of a microlithographic projection exposure apparatus | Michael Patra, Markus Deguenther, Frank Schlesener, Markus Schwab | 2018-05-29 |
| 9874819 | Mirror array | Markus Hauf, Lars Wischmeier, Fabian Haacker, Martin Endres, Johannes Eisenmenger | 2018-01-23 |