Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9983482 | Radiation collector, radiation source and lithographic apparatus | Erik Roelof Loopstra, Olav Waldemar Vladimir Frijns, Stig Bieling, Ivo Vanderhallen, Nicolaas Ten Kate +6 more | 2018-05-29 |
| 9860966 | Radiation source | Jan Bernard Plechelmus Van Schoot, Hermanus Johannes Maria Kreuwel, Andrei Mikhailovich Yakunin | 2018-01-02 |