Issued Patents 2018
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10120292 | Support apparatus, lithographic apparatus and device manufacturing method | Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Menno Fien, Antonius Franciscus Johannes De Groot +6 more | 2018-11-06 |
| 10018925 | Lithographic apparatus, drying device, metrology apparatus and device manufacturing method | Nicolaas Rudolf Kemper, Joost Jeroen Ottens, Marcel Beckers, Marco Polizzi, Michel Riepen +4 more | 2018-07-10 |
| 10018924 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Raymond Wilhelmus Louis Lafarre, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Siegfried Alexander Tromp, Jacobus Josephus Leijssen +3 more | 2018-07-10 |
| 9989867 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Raymond Wilhelmus Louis Lafarre, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade | 2018-06-05 |
| 9983482 | Radiation collector, radiation source and lithographic apparatus | Erik Roelof Loopstra, Olav Waldemar Vladimir Frijns, Stig Bieling, Antonius Theodorus Wilhelmus Kempen, Ivo Vanderhallen +6 more | 2018-05-29 |
| 9971255 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Rogier Hendrikus Magdalena Cortie, Niek Jacobus Johannes Roset, Michel Riepen, Henricus Jozef Castelijns, Cornelius Maria Rops +1 more | 2018-05-15 |
| 9927715 | Lithographic apparatus, cover for use in a lithographic apparatus and method for designing a cover for use in a lithographic apparatus | Niek Jacobus Johannes Roset, Sergei Shulepov, Raymond Wilhelmus Louis Lafarre | 2018-03-27 |
| 9904185 | Lithographic apparatus and device manufacturing method | Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +12 more | 2018-02-27 |
| 9857695 | Lithographic apparatus and device manufacturing method | Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Rudolf Kemper +2 more | 2018-01-02 |
| 9857696 | Substrate table, a lithographic apparatus and a device manufacturing method | Raymond Wilhelmus Louis Lafarre | 2018-01-02 |