Issued Patents 2018
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10126663 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg, Peter Van Delft | 2018-11-13 |
| 10120292 | Support apparatus, lithographic apparatus and device manufacturing method | Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Menno Fien, Antonius Franciscus Johannes De Groot, Christiaan Alexander Hoogendam +6 more | 2018-11-06 |
| 10018924 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Siegfried Alexander Tromp, Jacobus Josephus Leijssen +3 more | 2018-07-10 |
| 10001713 | Lithographic apparatus and method | Santiago del Puerto, Matthew Lipson, Kenneth C. Henderson, Louis John Markoya, Tammo Uitterdijk +3 more | 2018-06-19 |
| 9989867 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade | 2018-06-05 |
| 9927715 | Lithographic apparatus, cover for use in a lithographic apparatus and method for designing a cover for use in a lithographic apparatus | Niek Jacobus Johannes Roset, Nicolaas Ten Kate, Sergei Shulepov | 2018-03-27 |
| 9915877 | Object holder and lithographic apparatus | Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Martijn Houben, Koen Steffens +8 more | 2018-03-13 |
| 9889597 | Imprint lithography | Yvonne Wendela Kruijt-Stegeman, Raymond Jacobus Wilhelmus Knaapen, Johan Frederik Dijksman, Sander Frederik Wuister, Ivar Schram | 2018-02-13 |
| 9857696 | Substrate table, a lithographic apparatus and a device manufacturing method | Nicolaas Ten Kate | 2018-01-02 |