| 10114295 |
Lithographic apparatus and device manufacturing method |
Günes NAKIBOGLU, Jan Steven Christiaan Westerlaken, Frank Johannes Jacobus Van Boxtel, Maria del Carmen Mercado |
2018-10-30 |
| 9971252 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Martijn Houben, Hendrikus Johannes Marinus Van Abeelen, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks |
2018-05-15 |
| 9971254 |
Sensor, lithographic apparatus and device manufacturing method |
Johannes Henricus Wilhelmus Jacobs, Haico Victor Kok, Yuri Johannes Gabriël Van De Vijver, Johannes Antonius Maria Van De Wal, Bastiaan Andreas Wilhelmus Hubertus Knarren +6 more |
2018-05-15 |
| 9939738 |
Lithographic apparatus and an object positioning system |
Adrianus Hendrik Koevoets, Christianus Wilhelmus Johannes Berendsen, Rogier Hendrikus Magdalena Cortie, Jim Vincent Overkamp, Patricius Jacobus Neefs +4 more |
2018-04-10 |
| 9915877 |
Object holder and lithographic apparatus |
Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Martijn Houben, Raymond Wilhelmus Louis Lafarre, Koen Steffens +8 more |
2018-03-13 |
| 9904177 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Ivo Adam Johannes Thomas, Coen Cornelis Wilhelmus Verspaget, Ronald Van Der Ham, Gregory Martin Mason Corcoran, Ruud Hendrikus Martinus Johannes Bloks +2 more |
2018-02-27 |
| 9897928 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Johannes Henricus Wilhelmus Jacobs, Coen Cornelis Wilhelmus Verspaget, Ronald Van Der Ham, Ivo Adam Johannes Thomas +7 more |
2018-02-20 |