Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9971252 | Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method | Martijn Houben, Thibault Simon Mathieu Laurent, Hendrikus Johannes Marinus Van Abeelen, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks | 2018-05-15 |
| 9939738 | Lithographic apparatus and an object positioning system | Adrianus Hendrik Koevoets, Christianus Wilhelmus Johannes Berendsen, Rogier Hendrikus Magdalena Cortie, Jim Vincent Overkamp, Patricius Jacobus Neefs +4 more | 2018-04-10 |
| 9897928 | Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method | Johannes Henricus Wilhelmus Jacobs, Coen Cornelis Wilhelmus Verspaget, Ronald Van Der Ham, Ivo Adam Johannes Thomas, Martijn Houben +7 more | 2018-02-20 |