Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10120292 | Support apparatus, lithographic apparatus and device manufacturing method | Raymond Wilhelmus Louis Lafarre, Sjoerd Nicolaas Lambertus Donders, Menno Fien, Antonius Franciscus Johannes De Groot, Christiaan Alexander Hoogendam +6 more | 2018-11-06 |
| 10018926 | Lithographic apparatus and method of manufacturing a lithographic apparatus | Rogier Hendrikus Magdalena Cortie, Christianus Wilhelmus Johannes Berendsen, Andre Bernardus Jeunink, Jim Vincent Overkamp, Siegfried Alexander Tromp +2 more | 2018-07-10 |
| 9983489 | Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiation | Christianus Wilhelmus Johannes Berendsen, Marcel Beckers, Henricus Jozef Castelijns, Hubertus Antonius Geraets, Leon Martin Levasier +3 more | 2018-05-29 |
| 9939738 | Lithographic apparatus and an object positioning system | Christianus Wilhelmus Johannes Berendsen, Rogier Hendrikus Magdalena Cortie, Jim Vincent Overkamp, Patricius Jacobus Neefs, Putra SAPUTRA +4 more | 2018-04-10 |