Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9983489 | Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiation | Christianus Wilhelmus Johannes Berendsen, Marcel Beckers, Hubertus Antonius Geraets, Adrianus Hendrik Koevoets, Leon Martin Levasier +3 more | 2018-05-29 |
| 9971255 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Rogier Hendrikus Magdalena Cortie, Nicolaas Ten Kate, Niek Jacobus Johannes Roset, Michel Riepen, Cornelius Maria Rops +1 more | 2018-05-15 |