Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10133190 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Rogier Hendrikus Magdalena Cortie, Michel Riepen | 2018-11-20 |
| 10095129 | Lithographic apparatus and a method of manufacturing a device using a lithographic apparatus | Giovanni Luca Gattobigio, Erik Henricus Egidius Catharina Eummelen, Ruud Olieslagers, Gerben Pieterse, Laurentius Johannes Adrianus Van Bokhoven | 2018-10-09 |
| 10018921 | Lithographic apparatus and a device manufacturing method | Nicolaas Rudolf Kemper, Michel Riepen | 2018-07-10 |
| 10001712 | Immersion lithographic apparatus and device manufacturing method | Theodorus Wilhelmus Polet, Johannes Jacobus Matheus Baselmans, Willem Jan Bouman, Han Henricus Aldegonda Lempens, Theodorus Marinus Modderman +3 more | 2018-06-19 |
| 9971255 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Rogier Hendrikus Magdalena Cortie, Nicolaas Ten Kate, Niek Jacobus Johannes Roset, Michel Riepen, Henricus Jozef Castelijns +1 more | 2018-05-15 |