Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10095129 | Lithographic apparatus and a method of manufacturing a device using a lithographic apparatus | Giovanni Luca Gattobigio, Erik Henricus Egidius Catharina Eummelen, Ruud Olieslagers, Gerben Pieterse, Cornelius Maria Rops | 2018-10-09 |
| 10031428 | Gas flow optimization in reticle stage environment | Koen Cuypers, Marcelo Henrique De Andrade Oliveira, Marinus Jan Remie, Chattarbir Singh, Henricus Anita Jozef Wilhelmus Van De Ven +9 more | 2018-07-24 |
| 9939740 | Lithographic apparatus and device manufacturing method | Günes NAKIBOGLU, Martijn Van Baren, Frank Johannes Jacobus Van Boxtel, Koen Cuypers, Jeroen Gerard Gosen | 2018-04-10 |