Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10031428 | Gas flow optimization in reticle stage environment | Marcelo Henrique De Andrade Oliveira, Marinus Jan Remie, Chattarbir Singh, Laurentius Johannes Adrianus Van Bokhoven, Henricus Anita Jozef Wilhelmus Van De Ven +9 more | 2018-07-24 |
| 9939740 | Lithographic apparatus and device manufacturing method | Günes NAKIBOGLU, Martijn Van Baren, Frank Johannes Jacobus Van Boxtel, Jeroen Gerard Gosen, Laurentius Johannes Adrianus Van Bokhoven | 2018-04-10 |