Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10031428 | Gas flow optimization in reticle stage environment | Koen Cuypers, Marcelo Henrique De Andrade Oliveira, Chattarbir Singh, Laurentius Johannes Adrianus Van Bokhoven, Henricus Anita Jozef Wilhelmus Van De Ven +9 more | 2018-07-24 |
| 9897928 | Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method | Johan Gertrudis Cornelis Kunnen, Johannes Henricus Wilhelmus Jacobs, Coen Cornelis Wilhelmus Verspaget, Ronald Van Der Ham, Ivo Adam Johannes Thomas +7 more | 2018-02-20 |