Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10001712 | Immersion lithographic apparatus and device manufacturing method | Theodorus Wilhelmus Polet, Johannes Jacobus Matheus Baselmans, Willem Jan Bouman, Han Henricus Aldegonda Lempens, Theodorus Marinus Modderman +3 more | 2018-06-19 |
| 9904177 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Ivo Adam Johannes Thomas, Coen Cornelis Wilhelmus Verspaget, Thibault Simon Mathieu Laurent, Gregory Martin Mason Corcoran, Ruud Hendrikus Martinus Johannes Bloks +2 more | 2018-02-27 |
| 9897928 | Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method | Johan Gertrudis Cornelis Kunnen, Johannes Henricus Wilhelmus Jacobs, Coen Cornelis Wilhelmus Verspaget, Ivo Adam Johannes Thomas, Martijn Houben +7 more | 2018-02-20 |