Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10001712 | Immersion lithographic apparatus and device manufacturing method | Theodorus Wilhelmus Polet, Johannes Jacobus Matheus Baselmans, Willem Jan Bouman, Han Henricus Aldegonda Lempens, Cornelius Maria Rops +3 more | 2018-06-19 |
| 9964858 | Lithographic apparatus and device manufacturing method | Joannes Theodoor De Smit, Vadim Yevgenyevich Banine, Theodorus Hubertus Josephus Bisschops, Marcel Mathijs Theodore Marie Dierichs | 2018-05-08 |