Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10001712 | Immersion lithographic apparatus and device manufacturing method | Theodorus Wilhelmus Polet, Johannes Jacobus Matheus Baselmans, Han Henricus Aldegonda Lempens, Theodorus Marinus Modderman, Cornelius Maria Rops +3 more | 2018-06-19 |