| 10103508 |
Electron injector and free electron laser |
Andrey Nikipelov, Pieter Willem Herman De Jager, Gosse Charles De Vries, Olav Waldemar Vladimir Frijns, Leonardus Adrianus Gerardus Grimminck +7 more |
2018-10-16 |
| 10031422 |
Lithographic apparatus |
Andrey Nikipelov, Andrei Mikhailovich Yakunin |
2018-07-24 |
| 10001709 |
Lithographic apparatus, spectral purity filter and device manufacturing method |
Erik Roelof Loopstra, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot, Gerardus Hubertus Petrus Maria Swinkels, Andrei Mikhailovich Yakunin +2 more |
2018-06-19 |
| 9989844 |
Pellicle for reticle and multilayer mirror |
Andrei Mikhailovich Yakunin, Erik Roelof Loopstra, Harmen Klaas Van Der Schoot, Lucas Henricus Johannes Stevens, Maarten Van Kampen |
2018-06-05 |
| 9986628 |
Method and apparatus for generating radiation |
Erik Roelof Loopstra, Andrei Mikhailovich Yakunin, Andrey Nikipelov, Edgar Alberto Osorio Oliveros, Alexander Matthijs Struycken +2 more |
2018-05-29 |
| 9964858 |
Lithographic apparatus and device manufacturing method |
Joannes Theodoor De Smit, Theodorus Hubertus Josephus Bisschops, Marcel Mathijs Theodore Marie Dierichs, Theodorus Marinus Modderman |
2018-05-08 |
| 9927699 |
Imprint lithography |
Sander Frederik Wuister |
2018-03-27 |
| 9897930 |
Optical element comprising oriented carbon nanotube sheet and lithographic apparatus comprising such optical element |
Leonid Aizikovitch Sjmaenok, Johannes Hubertus Josephina Moors, Denis Alexandrovich Glushkov, Andrei Mikhailovich Yakunin |
2018-02-20 |