Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9964852 | Source collector apparatus, lithographic apparatus and method | Niek Antonius Jacobus Maria Kleemans, Ronald Johannes Hultermans, Benedictus Mathijs Renkens, Gerardus Hubertus Petrus Maria Swinkels, Christiaan Johannes Petrus Verspeek | 2018-05-08 |
| 9897930 | Optical element comprising oriented carbon nanotube sheet and lithographic apparatus comprising such optical element | Leonid Aizikovitch Sjmaenok, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Andrei Mikhailovich Yakunin | 2018-02-20 |