Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10001709 | Lithographic apparatus, spectral purity filter and device manufacturing method | Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Jan Bernard Plechelmus Van Schoot, Gerardus Hubertus Petrus Maria Swinkels, Andrei Mikhailovich Yakunin +2 more | 2018-06-19 |
| 9897930 | Optical element comprising oriented carbon nanotube sheet and lithographic apparatus comprising such optical element | Leonid Aizikovitch Sjmaenok, Vadim Yevgenyevich Banine, Denis Alexandrovich Glushkov, Andrei Mikhailovich Yakunin | 2018-02-20 |