Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10007197 | Sensor system, substrate handling system and lithographic apparatus | Joeri Lof, Joost Kauffman, Martin Dieter Nico Peters, Petrus Theodorus Rutgers, Martijn Hendrikus Wilhelmus Stopel +2 more | 2018-06-26 |
| 9989844 | Pellicle for reticle and multilayer mirror | Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Lucas Henricus Johannes Stevens, Maarten Van Kampen | 2018-06-05 |