Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10007197 | Sensor system, substrate handling system and lithographic apparatus | Joeri Lof, Joost Kauffman, Petrus Theodorus Rutgers, Martijn Hendrikus Wilhelmus Stopel, Gerard Cornelis Van Den Eijkel +2 more | 2018-06-26 |