Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9964858 | Lithographic apparatus and device manufacturing method | Joannes Theodoor De Smit, Vadim Yevgenyevich Banine, Marcel Mathijs Theodore Marie Dierichs, Theodorus Marinus Modderman | 2018-05-08 |