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Lithographic apparatus and device manufacturing method |
Günes NAKIBOGLU, Thomas Petrus Hendricus Warmerdam, Jan Steven Christiaan Westerlaken, Johannes Pieter Kroes |
2018-11-20 |
| 10114295 |
Lithographic apparatus and device manufacturing method |
Günes NAKIBOGLU, Jan Steven Christiaan Westerlaken, Maria del Carmen Mercado, Thibault Simon Mathieu Laurent |
2018-10-30 |
| 10114299 |
Lithographic apparatus |
Günes NAKIBOGLU, Mark Constant Johannes Baggen, Gerard Johannes Boogaard, Nicolaas Rudolf Kemper, Sander Kerssemakers +6 more |
2018-10-30 |
| 10031428 |
Gas flow optimization in reticle stage environment |
Koen Cuypers, Marcelo Henrique De Andrade Oliveira, Marinus Jan Remie, Chattarbir Singh, Laurentius Johannes Adrianus Van Bokhoven +9 more |
2018-07-24 |
| 9977351 |
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature |
Earl William Ebert, Johannes Onvlee, Samir Nayfeh, Mark Josef Schuster, Peter A. Delmastro +5 more |
2018-05-22 |
| 9977348 |
Lithographic apparatus and method |
Günes NAKIBOGLU, Suzanne Johanna Antonetta Geertruda Cosijns, Anne Willemijn Bertine Quist, Lukasz Sosniak, Engelbertus Antonius Fransiscus Van Der Pasch |
2018-05-22 |
| 9939740 |
Lithographic apparatus and device manufacturing method |
Günes NAKIBOGLU, Martijn Van Baren, Koen Cuypers, Jeroen Gerard Gosen, Laurentius Johannes Adrianus Van Bokhoven |
2018-04-10 |