Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9977351 | Patterning device support, lithographic apparatus, and method of controlling patterning device temperature | Johannes Onvlee, Samir Nayfeh, Mark Josef Schuster, Peter A. Delmastro, Christopher Charles Ward +5 more | 2018-05-22 |
| 9891540 | Measuring method, measurement apparatus, lithographic apparatus and device manufacturing method | Franciscus Godefridus Casper Bijnen | 2018-02-13 |