Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10151987 | Measuring method, apparatus and substrate | David Deckers, Sami Musa | 2018-12-11 |
| 10139740 | Lithographic apparatus and device manufacturing method | Edo Maria Hulsebos | 2018-11-27 |
| 9891540 | Measuring method, measurement apparatus, lithographic apparatus and device manufacturing method | Earl William Ebert | 2018-02-13 |