Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9977351 | Patterning device support, lithographic apparatus, and method of controlling patterning device temperature | Earl William Ebert, Johannes Onvlee, Samir Nayfeh, Mark Josef Schuster, Christopher Charles Ward +5 more | 2018-05-22 |
| 9857694 | Estimating deformation of a patterning device and/or a change in its position | Bearrach Moest, Johannes Onvlee, Adrianus Martinus Van Der Wielen, Christopher Charles Ward | 2018-01-02 |