Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9958788 | Method of operating a patterning device and lithographic apparatus | Vitaliy Prosyentsov, Willem Jurrianus Venema, Kars Zeger Troost | 2018-05-01 |
| 9857694 | Estimating deformation of a patterning device and/or a change in its position | Bearrach Moest, Peter A. Delmastro, Johannes Onvlee, Christopher Charles Ward | 2018-01-02 |