Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9977348 | Lithographic apparatus and method | Günes NAKIBOGLU, Suzanne Johanna Antonetta Geertruda Cosijns, Anne Willemijn Bertine Quist, Lukasz Sosniak, Frank Johannes Jacobus Van Boxtel | 2018-05-22 |
| 9915880 | Stage apparatus, lithographic apparatus and method of positioning an object table | Andre Bernardus Jeunink, Robbert Edgar Van Leeuwen, Emiel Jozef Melanie Eussen | 2018-03-13 |
| 9891542 | Lithographic apparatus and device manufacturing method | Jan Steven Christiaan Westerlaken, Gerardus Arnoldus Hendricus Franciscus Janssen, Peter Paul Steijaert, Franciscus Van De Mast | 2018-02-13 |