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Lithographic apparatus and device manufacturing method |
Martinus Hendrikus Antonius Leenders, Joost Jeroen Ottens |
2018-11-13 |
| 10114299 |
Lithographic apparatus |
Günes NAKIBOGLU, Mark Constant Johannes Baggen, Gerard Johannes Boogaard, Sander Kerssemakers, Robertus Mathijs Gerardus Rijs +6 more |
2018-10-30 |
| 10018921 |
Lithographic apparatus and a device manufacturing method |
Cornelius Maria Rops, Michel Riepen |
2018-07-10 |
| 10018925 |
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method |
Nicolaas Ten Kate, Joost Jeroen Ottens, Marcel Beckers, Marco Polizzi, Michel Riepen +4 more |
2018-07-10 |
| 9964865 |
Method of adjusting speed and/or routing of a table movement plan and a lithographic apparatus |
Cédric Désiré Grouwstra, Norbertus Josephus Martinus Van Den Nieuwelaar, Dirk De Vries, Hua Li, Marinus Jochemsen |
2018-05-08 |
| 9946172 |
System for positioning an object in lithography |
Peter Paul HEMPENIUS, Martijn Houben, Robertus Mathijs Gerardus Rijs, Paul Corné Henri DE WIT, Stijn Willem Boere +2 more |
2018-04-17 |
| 9904185 |
Lithographic apparatus and device manufacturing method |
Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +12 more |
2018-02-27 |
| 9857695 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate +2 more |
2018-01-02 |