Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10114300 | Lithographic apparatus and device manufacturing method | Mark Marcus Gerardus Heeren, Peter Michel Silvester Maria Heijmans, Jacob Jan Velten, Johannes Hubertus Antonius Van De Rijdt, Godfried Katharina Hubertus Franciscus Geelen +1 more | 2018-10-30 |
| 9977341 | Lithographic apparatus and device manufacturing method | — | 2018-05-22 |
| 9904185 | Lithographic apparatus and device manufacturing method | Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +12 more | 2018-02-27 |