Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10114300 | Lithographic apparatus and device manufacturing method | Henrikus Herman Marie Cox, Mark Marcus Gerardus Heeren, Peter Michel Silvester Maria Heijmans, Jacob Jan Velten, Godfried Katharina Hubertus Franciscus Geelen +1 more | 2018-10-30 |
| 9971254 | Sensor, lithographic apparatus and device manufacturing method | Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Haico Victor Kok, Yuri Johannes Gabriël Van De Vijver, Johannes Antonius Maria Van De Wal +6 more | 2018-05-15 |