Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9971254 | Sensor, lithographic apparatus and device manufacturing method | Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Yuri Johannes Gabriël Van De Vijver, Johannes Antonius Maria Van De Wal, Bastiaan Andreas Wilhelmus Hubertus Knarren +6 more | 2018-05-15 |
| 9891532 | Lithographic method to apply a pattern to a substrate and lithographic apparatus | — | 2018-02-13 |
| 9864282 | Sensor system for lithography | Robbert Jan Voogd | 2018-01-09 |