Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10114300 | Lithographic apparatus and device manufacturing method | Henrikus Herman Marie Cox, Mark Marcus Gerardus Heeren, Peter Michel Silvester Maria Heijmans, Johannes Hubertus Antonius Van De Rijdt, Godfried Katharina Hubertus Franciscus Geelen +1 more | 2018-10-30 |