| 10146143 |
Lithographic apparatus and device manufacturing method |
Timotheus Franciscus Sengers, Hans Jansen, Arjen Boogaard |
2018-12-04 |
| 10120292 |
Support apparatus, lithographic apparatus and device manufacturing method |
Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Menno Fien, Antonius Franciscus Johannes De Groot, Christiaan Alexander Hoogendam +6 more |
2018-11-06 |
| 10095128 |
Thermal conditioning method |
Theodorus Petrus Maria Cadee, Benjamin Joseph De Smet, Adrianus Marinus Verdonck |
2018-10-09 |
| 10025196 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +1 more |
2018-07-17 |
| 9989861 |
Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +5 more |
2018-06-05 |
| 9983482 |
Radiation collector, radiation source and lithographic apparatus |
Erik Roelof Loopstra, Olav Waldemar Vladimir Frijns, Stig Bieling, Antonius Theodorus Wilhelmus Kempen, Ivo Vanderhallen +6 more |
2018-05-29 |
| 9952515 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Christiaan Alexander Hoogendam +8 more |
2018-04-24 |
| 9952514 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Martinus Hendrikus Antonius Leenders |
2018-04-24 |
| 9904185 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +12 more |
2018-02-27 |
| 9885965 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Joeri Lof, Erik Roelof Loopstra, Johannes Catharinus Hubertus Mulkens +4 more |
2018-02-06 |
| 9857695 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Nicolaas Rudolf Kemper +2 more |
2018-01-02 |